Assignee
MORITA SHINYA
JP·7 granted patents·1 pending application·776 citations·filing 2009–2011
Top patents by PatentIndex Score
8 records- 0199US8264291B2Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the sameMORITA SHINYA·Filed 2010·Granted Sep 11, 2012·269 cites·20 claims
- 0295US8529701B2Substrate processing apparatusMORITA SHINYA·Filed 2009·Granted Sep 10, 2013·464 cites·8 claims
- 0391US9184298B2Interconnect structure and sputtering targetMORITA SHINYA·Filed 2011·Granted Nov 10, 2015·13 cites·8 claims
- 0485US8851886B2Substrate processing apparatus and method of manufacturing semiconductor deviceMORITA SHINYA·Filed 2009·Granted Oct 7, 2014·11 cites·19 claims
- 0585US8076615B2Substrate processing apparatus and method of manufacturing semiconductor deviceMORITA SHINYA·Filed 2009·Granted Dec 13, 2011·13 cites·9 claims
- 0677US10468535B2Oxide for semiconductor layer of thin film transistor, sputtering target, and thin film transistorMORITA SHINYA·Filed 2011·Granted Nov 5, 2019·4 cites·6 claims
- 0770US9299474B2Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistorMORITA SHINYA·Filed 2011·Granted Mar 29, 2016·2 cites·8 claims
- 0838US2013270109A1Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistorMORITA SHINYA·Filed 2011·Application pending·0 cites
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