Assignee
MOTOKAWA TAKEHARU
JP·1 granted patent·2 pending applications·5 citations·filing 2006–2010
Top patents by PatentIndex Score
3 records- 0172US8834674B2Plasma etching apparatusMOTOKAWA TAKEHARU·Filed 2010·Granted Sep 16, 2014·5 cites·8 claims
- 0242US2008283500A1Plasma processing apparatus and plasma processing methodMOTOKAWA TAKEHARU·Filed 2008·Application pending·0 cites
- 0334US2006292727A1Photomask plasma etching apparatus, etching method, and photomask forming methodMOTOKAWA TAKEHARU·Filed 2006·Application pending·0 cites
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