Assignee
MUDD DANIEL T
US·5 granted patents·3 pending applications·53 citations·filing 2006–2016
Top patents by PatentIndex Score
8 records- 0197US9188989B1Flow node to deliver process gas using a remote pressure measurement deviceMUDD DANIEL T·Filed 2012·Granted Nov 17, 2015·33 cites·13 claims
- 0292US8770215B1Low flow injector to deliver a low flow of gas to a remote locationMUDD DANIEL T·Filed 2012·Granted Jul 8, 2014·18 cites·18 claims
- 0361US9448564B2Gas delivery system for outputting fast square waves of process gas during semiconductor processingMUDD DANIEL T·Filed 2014·Granted Sep 20, 2016·1 cites·18 claims
- 0458US9976887B1Wider dynamic accuracy range for gas delivery devicesMUDD DANIEL T·Filed 2014·Granted May 22, 2018·1 cites·17 claims
- 0545US2007089789A1Higher accuracy pressure based flow controllerMUDD DANIEL T·Filed 2006·Application pending·0 cites
- 0641US10497542B2Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor processMUDD DANIEL T·Filed 2016·Granted Dec 3, 2019·0 cites·19 claims
- 0737US2016041564A1Reverse flow mode for regulating pressure of an accumulated volume with fast upstream bleed downMUDD DANIEL T·Filed 2015·Application pending·0 cites
- 0835US2016018828A1Pressure-based mass flow controller with reverse flow mode for fast bleed downMUDD DANIEL T·Filed 2015·Application pending·0 cites
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