Assignee
MUETEC AUTOMATISIERTE MIKROSKO
DE·1 granted patent·1 pending application·0 citations·filing 2004–2008
Top patents by PatentIndex Score
2 records- 0128US2009066970A1Arrangement and method for improving the measurement accuracy in the nm range for optical systemsMUETEC AUTOMATISIERTE MIKROSKO·Filed 2008·Application pending·0 cites
- 0218US7460962B2Method for an automatic optical measuring of an OPC structureMUETEC AUTOMATISIERTE MIKROSKO·Filed 2004·Granted Dec 2, 2008·0 cites·6 claims
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