Assignee

MUI COLLIN K L

US·2 granted patents·414 citations·filing 2009–2012

Technology mixB05C2 C23C2 H10P2 H01L1

Top patents by PatentIndex Score

2 records

0196US8278224B1Flowable oxide deposition using rapid delivery of process gasesMUI COLLIN K L·Filed 2009·Granted Oct 2, 2012·396 cites·21 claims
0293US9064684B1Flowable oxide deposition using rapid delivery of process gasesMUI COLLIN K L·Filed 2012·Granted Jun 23, 2015·18 cites·19 claims

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