Assignee
MULKENS JOHANNES CATHARINUS HUBERTUS
NL·10 granted patents·21 citations·filing 2008–2012
Top patents by PatentIndex Score
10 records- 0190US8964163B2Immersion lithographic apparatus and device manufacturing method with a projection system having a part movable relative to another partMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2012·Granted Feb 24, 2015·4 cites·20 claims
- 0289US9417519B2Lithographic apparatus, device manufacturing method, and method of correcting a maskMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2012·Granted Aug 16, 2016·5 cites·20 claims
- 0387US8514369B2Lithographic apparatus and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2010·Granted Aug 20, 2013·3 cites·20 claims
- 0481US8174674B2Lithographic apparatus and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2008·Granted May 8, 2012·4 cites·38 claims
- 0576US8218125B2Immersion lithographic apparatus with a projection system having an isolated or movable partMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2008·Granted Jul 10, 2012·2 cites·10 claims
- 0670US8848162B2Lithographic apparatus and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2010·Granted Sep 30, 2014·1 cites·7 claims
- 0765US9330912B2Lithographic apparatus, fluid combining unit and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2011·Granted May 3, 2016·1 cites·19 claims
- 0864US8259289B2Lithographic apparatus and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2009·Granted Sep 4, 2012·1 cites·12 claims
- 0960US10197927B2Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or gratingMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2009·Granted Feb 5, 2019·0 cites·22 claims
- 1054US8570486B2Lithographic apparatus and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2012·Granted Oct 29, 2013·0 cites·20 claims
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