Assignee
MULTI PLANAR TECHNOLOGIES INC
US·8 granted patents·399 citations·filing 2000–2003
Technology mixB24B8
Top patents by PatentIndex Score
8 records- 0196US6558232B1System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal controlMULTI PLANAR TECHNOLOGIES INC·Filed 2000·Granted May 6, 2003·92 cites·27 claims
- 0296US6506105B1System and method for pneumatic diaphragm CMP head having separate retaining ring and multi-region wafer pressure controlMULTI PLANAR TECHNOLOGIES INC·Filed 2000·Granted Jan 14, 2003·105 cites·70 claims
- 0392US6623343B2System and method for CMP head having multi-pressure annular zone subcarrier material removal controlMULTI PLANAR TECHNOLOGIES INC·Filed 2001·Granted Sep 23, 2003·51 cites·38 claims
- 0490US6893327B2Chemical mechanical polishing apparatus and method having a retaining ring with a contoured surfaceMULTI PLANAR TECHNOLOGIES INC·Filed 2001·Granted May 17, 2005·42 cites·43 claims
- 0590US6887132B2Slurry distributor for chemical mechanical polishing apparatus and method of using the sameMULTI PLANAR TECHNOLOGIES INC·Filed 2002·Granted May 3, 2005·44 cites·44 claims
- 0684US6540590B1Chemical mechanical polishing apparatus and method having a rotating retaining ringMULTI PLANAR TECHNOLOGIES INC·Filed 2000·Granted Apr 1, 2003·26 cites·22 claims
- 0782US6966822B2System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal controlMULTI PLANAR TECHNOLOGIES INC·Filed 2003·Granted Nov 22, 2005·18 cites·13 claims
- 0879US6527625B1Chemical mechanical polishing apparatus and method having a soft backed polishing headMULTI PLANAR TECHNOLOGIES INC·Filed 2000·Granted Mar 4, 2003·21 cites·34 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →