Assignee

MULTIPLANAR TECHNOLOGIES INC

US·1 granted patent·13 citations·filing 2003–2003

Technology mixB24B1 H10P1

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0166US7118456B2Polishing head, retaining ring for use therewith and method fo polishing a substrateMULTIPLANAR TECHNOLOGIES INC·Filed 2003·Granted Oct 10, 2006·13 cites·14 claims

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