Assignee
MURAKAMI KATSUHIKO
JP·2 granted patents·2 pending applications·8 citations·filing 2008–2009
Top patents by PatentIndex Score
4 records- 0169US8121254B2Optical element, exposure apparatus using this, and device manufacturing methodMURAKAMI KATSUHIKO·Filed 2009·Granted Feb 21, 2012·6 cites·15 claims
- 0250US8809818B2EUV light source, EUV exposure apparatus, and electronic device manufacturing methodMURAKAMI KATSUHIKO·Filed 2009·Granted Aug 19, 2014·2 cites·18 claims
- 0349US2008266651A1Optical apparatus, multilayer-film reflective mirror, exposure apparatus, and deviceMURAKAMI KATSUHIKO·Filed 2008·Application pending·0 cites
- 0444US2008268380A1Optical apparatus, multilayer-film reflective mirror, exposure apparatus, and deviceMURAKAMI KATSUHIKO·Filed 2008·Application pending·0 cites
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