Assignee
MURATA HITOSHI
JP·4 granted patents·5 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0176US9460946B2Substrate processing apparatus and heating equipmentMURATA HITOSHI·Filed 2011·Granted Oct 4, 2016·4 cites·8 claims
- 0263US8847124B2Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the sameMURATA HITOSHI·Filed 2010·Granted Sep 30, 2014·1 cites·7 claims
- 0348US8535444B2Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating partMURATA HITOSHI·Filed 2009·Granted Sep 17, 2013·0 cites·4 claims
- 0436US9064912B2Heating device, substrate processing apparatus, and method of manufacturing semiconductor deviceMURATA HITOSHI·Filed 2010·Granted Jun 23, 2015·0 cites·11 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →