Assignee
N & K TECHNOLOGY INC
US·37 granted patents·909 citations·filing 1997–2009
Top patents by PatentIndex Score
37 records- 0194US6392756B1Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrateN & K TECHNOLOGY INC·Filed 1999·Granted May 21, 2002·123 cites·56 claims
- 0293US6128085AReflectance spectroscopic apparatus with toroidal mirrorsN & K TECHNOLOGY INC·Filed 1999·Granted Oct 3, 2000·118 cites·16 claims
- 0392US7525672B1Efficient characterization of symmetrically illuminated symmetric 2-D gratingsN & K TECHNOLOGY INC·Filed 2005·Granted Apr 28, 2009·23 cites·42 claims
- 0489US7999936B1Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle densityN & K TECHNOLOGY INC·Filed 2009·Granted Aug 16, 2011·16 cites·4 claims
- 0589US7755775B1Broadband optical metrology with reduced wave front distortion, chromatic dispersion compensation and monitoringN & K TECHNOLOGY INC·Filed 2006·Granted Jul 13, 2010·19 cites·46 claims
- 0689US6765676B1Simultaneous compensation of source and detector drift in optical systemsN & K TECHNOLOGY INC·Filed 2000·Granted Jul 20, 2004·38 cites·25 claims
- 0787US6710865B2Method of inferring optical parameters outside of a measurement spectral rangeN & K TECHNOLOGY INC·Filed 2001·Granted Mar 23, 2004·39 cites·18 claims
- 0887US6091485AMethod and apparatus for optically determining physical parameters of underlayersN & K TECHNOLOGY INC·Filed 1999·Granted Jul 18, 2000·78 cites·25 claims
- 0985US6379014B1Graded anti-reflective coatings for photolithographyN & K TECHNOLOGY INC·Filed 2000·Granted Apr 30, 2002·26 cites·12 claims
- 1085US5991022AReflectance spectrophotometric apparatus with toroidal mirrorsN & K TECHNOLOGY INC·Filed 1998·Granted Nov 23, 1999·65 cites·26 claims
- 1184US7290978B2Photomask flipper and single direction inspection device for dual side photomask inspectionN & K TECHNOLOGY INC·Filed 2004·Granted Nov 6, 2007·32 cites·10 claims
- 1284US6327035B1Method and apparatus for optically examining miniature patternsN & K TECHNOLOGY INC·Filed 1999·Granted Dec 4, 2001·53 cites·26 claims
- 1383US7391524B1System and method for efficient characterization of diffracting structures with incident plane parallel to grating linesN & K TECHNOLOGY INC·Filed 2004·Granted Jun 24, 2008·30 cites·35 claims
- 1483US7289214B1System and method for measuring overlay alignment using diffraction gratingsN & K TECHNOLOGY INC·Filed 2004·Granted Oct 30, 2007·23 cites·22 claims
- 1582US7962242B1Automated spatial flipping apparatus and system for photomasks and photomasks with pelliclesN & K TECHNOLOGY INC·Filed 2008·Granted Jun 14, 2011·8 cites·37 claims
- 1681US6594025B2Method of monitoring thin-film processes and metrology tool thereofN & K TECHNOLOGY INC·Filed 2001·Granted Jul 15, 2003·24 cites·22 claims
- 1779US5880831AReflectance spectrophotometric apparatus with optical relayN & K TECHNOLOGY INC·Filed 1997·Granted Mar 9, 1999·54 cites·20 claims
- 1878US6811370B2Wafer handling robot having X-Y stage for wafer handling and positioningN & K TECHNOLOGY INC·Filed 2000·Granted Nov 2, 2004·21 cites·11 claims
- 1977US7397554B1Apparatus and method for examining a disk-shaped sample on an X-Y-theta stageN & K TECHNOLOGY INC·Filed 2006·Granted Jul 8, 2008·6 cites·23 claims
- 2077US7349103B1System and method for high intensity small spot optical metrologyN & K TECHNOLOGY INC·Filed 2005·Granted Mar 25, 2008·10 cites·30 claims
- 2175US7505147B1Efficient calculation of grating matrix elements for 2-D diffractionN & K TECHNOLOGY INC·Filed 2006·Granted Mar 17, 2009·4 cites·18 claims
- 2273US7756677B1Implementation of rigorous coupled wave analysis having improved efficiency for characterizationN & K TECHNOLOGY INC·Filed 2007·Granted Jul 13, 2010·6 cites·14 claims
- 2371US6825933B2Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoringN & K TECHNOLOGY INC·Filed 2002·Granted Nov 30, 2004·9 cites·38 claims
- 2470US7717661B1Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transferN & K TECHNOLOGY INC·Filed 2006·Granted May 18, 2010·5 cites·12 claims
- 2570US7253909B1Phase shift measurement using transmittance spectraN & K TECHNOLOGY INC·Filed 2005·Granted Aug 7, 2007·2 cites·24 claims
- 2668US6075612AOptical devices having toroidal mirrors for performing reflectance measurementsN & K TECHNOLOGY INC·Filed 1999·Granted Jun 13, 2000·29 cites·30 claims
- 2767US7248364B2Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot sizeN & K TECHNOLOGY INC·Filed 2003·Granted Jul 24, 2007·11 cites·34 claims
- 2867US6891628B2Method and apparatus for examining features on semi-transparent and transparent substratesN & K TECHNOLOGY INC·Filed 2003·Granted May 10, 2005·5 cites·34 claims
- 2964US7397030B1Integrated local and global optical metrology for samples having miniature featuresN & K TECHNOLOGY INC·Filed 2006·Granted Jul 8, 2008·3 cites·46 claims
- 3064US7212293B1Optical determination of pattern feature parameters using a scalar model having effective optical propertiesN & K TECHNOLOGY INC·Filed 2004·Granted May 1, 2007·5 cites·28 claims
- 3161US7616301B2Disc clamping device for multiple standard discsN & K TECHNOLOGY INC·Filed 2004·Granted Nov 10, 2009·5 cites·19 claims
- 3255US7327457B2Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changesN & K TECHNOLOGY INC·Filed 2003·Granted Feb 5, 2008·5 cites·34 claims
- 3348US7679736B1System and method for optical photomask inspection through pellicleN & K TECHNOLOGY INC·Filed 2008·Granted Mar 16, 2010·0 cites·12 claims
- 3447US6441607B1Apparatus for docking a floating test stage in a terrestrial baseN & K TECHNOLOGY INC·Filed 2000·Granted Aug 27, 2002·4 cites·5 claims
- 3545US7330256B1Spectrophotometric system with reduced angle of incidenceN & K TECHNOLOGY INC·Filed 2005·Granted Feb 12, 2008·0 cites·5 claims
- 3643US7044476B2Compact pinlifter assembly integrated in wafer chuckN & K TECHNOLOGY INC·Filed 2003·Granted May 16, 2006·1 cites·21 claims
- 3741US6084666AApparatus for multiple positioning of a planar sample at a repeatable distance and angle from a testing deviceN & K TECHNOLOGY INC·Filed 1999·Granted Jul 4, 2000·9 cites·40 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →