Assignee
NAGAIKE HIROSHI
JP·2 granted patents·2 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0171US8531664B2Particle number measurement methodNAGAIKE HIROSHI·Filed 2011·Granted Sep 10, 2013·2 cites·5 claims
- 0247US8578952B2Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the methodNAGAIKE HIROSHI·Filed 2011·Granted Nov 12, 2013·0 cites·6 claims
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