Assignee
NAGASEKI SUMIE
JP·2 granted patents·8 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0168US8242026B2Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage mediumNAGASEKI SUMIE·Filed 2007·Granted Aug 14, 2012·5 cites·16 claims
- 0263US8293662B2Method of manufacturing semiconductor device, apparatus for manufacturing same, and storage mediumNAGASEKI SUMIE·Filed 2008·Granted Oct 23, 2012·3 cites·8 claims
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