Assignee
NAKAGAWA YOSHIHIKO
JP·3 granted patents·11 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0178US8271119B2Substrate processing apparatus and substrate processing systemNAKAGAWA YOSHIHIKO·Filed 2009·Granted Sep 18, 2012·7 cites·18 claims
- 0269US8712568B2Substrate processing apparatus and display method of substrate processing apparatusNAKAGAWA YOSHIHIKO·Filed 2010·Granted Apr 29, 2014·3 cites·14 claims
- 0361US8768502B2Substrate processing apparatus and substrate processing systemNAKAGAWA YOSHIHIKO·Filed 2012·Granted Jul 1, 2014·1 cites·14 claims
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