Assignee
NAKAO KEN
JP·4 granted patents·3 pending applications·21 citations·filing 2007–2012
Top patents by PatentIndex Score
7 records- 0186US8167521B2Substrate transfer apparatus and vertical heat processing apparatusNAKAO KEN·Filed 2007·Granted May 1, 2012·11 cites·10 claims
- 0284US8197600B2Vaporizer and semiconductor processing systemNAKAO KEN·Filed 2008·Granted Jun 12, 2012·6 cites·19 claims
- 0372US8470720B2Film forming apparatus and film forming methodNAKAO KEN·Filed 2009·Granted Jun 25, 2013·4 cites·7 claims
- 0444US8546185B2Method for manufacturing semiconductor deviceNAKAO KEN·Filed 2012·Granted Oct 1, 2013·0 cites·3 claims
- 0543US2008105194A1Gas supply system, gas supply method, method of cleaning thin film forming apparatus, thin film forming method and thin film forming apparatusNAKAO KEN·Filed 2007·Application pending·0 cites
- 0639US2014174364A1Heat treatment deviceNAKAO KEN·Filed 2012·Application pending·0 cites
- 0736US2015214088A1Pickup method and pickup deviceNAKAO KEN·Filed 2011·Application pending·0 cites
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