Assignee

NAKASHIMA MUTSUO

JP·1 granted patent·0 citations·filing 2007–2007

Technology mixC08G1 C08L1 G03F1 Y10S1

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1 record

0141US8153836B2Silsesquioxane compound mixture, hydrolyzable silane compound, making methods, resist composition, patterning process, and substrate processingNAKASHIMA MUTSUO·Filed 2007·Granted Apr 10, 2012·0 cites·1 claims

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