Assignee

NANAYA TECHNOLOGY CORP

TW·1 granted patent·11 citations·filing 2004–2004

Technology mixH10B1 H10D1 H10P1 H10W1 Y10S1

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0161US6808984B1Method for forming a contact openingNANAYA TECHNOLOGY CORP·Filed 2004·Granted Oct 26, 2004·11 cites·20 claims

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