Assignee
NANBA HIROMITSU
JP·3 granted patents·19 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0188US8113221B2Substrate cleaning method, substrate cleaning apparatus and computer readable recording mediumNANBA HIROMITSU·Filed 2011·Granted Feb 14, 2012·10 cites·14 claims
- 0279US8479753B2Liquid processing apparatus and methodNANBA HIROMITSU·Filed 2007·Granted Jul 9, 2013·7 cites·13 claims
- 0364US8152933B2Substrate processing apparatus, substrate processing method, and drain cup cleaning methodNANBA HIROMITSU·Filed 2007·Granted Apr 10, 2012·2 cites·6 claims
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