Assignee
NANJING LIAN SEMICONDUCTOR LTD
CN·1 granted patent·2 pending applications·3 citations·filing 2020–2021
Top patents by PatentIndex Score
3 records- 0187US11105753B2Wafer shape and flatness measurement apparatus and methodNANJING LIAN SEMICONDUCTOR LTD·Filed 2021·Granted Aug 31, 2021·3 cites·20 claims
- 0256US2022118587A1Air-bearing chuckNANJING LIAN SEMICONDUCTOR LTD·Filed 2021·Application pending·0 cites
- 0351US2021247178A1Tool architecture for wafer geometry measurement in semiconductor industryNANJING LIAN SEMICONDUCTOR LTD·Filed 2020·Application pending·0 cites
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