Assignee
NANO ARCHITECT RES CORP
TW·3 granted patents·1 pending application·173 citations·filing 1999–2001
Top patents by PatentIndex Score
4 records- 0192US6451161B1Method and apparatus for generating high-density uniform plasmaNANO ARCHITECT RES CORP·Filed 2000·Granted Sep 17, 2002·103 cites·21 claims
- 0287US6319858B1Methods for reducing a dielectric constant of a dielectric film and for forming a low dielectric constant porous filmNANO ARCHITECT RES CORP·Filed 2000·Granted Nov 20, 2001·50 cites·29 claims
- 0365US6462483B1Induction plasma processing chamberNANO ARCHITECT RES CORP·Filed 1999·Granted Oct 8, 2002·20 cites·12 claims
- 0434US2002121345A1Multi-chamber system for semiconductor processNANO ARCHITECT RES CORP·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when NANO ARCHITECT RES CORP files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →