Assignee
NIKON PRECISION INC
US·19 granted patents·4,236 citations·filing 1990–1998
Top patents by PatentIndex Score
19 records- 0199US5825043AFocusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatusNIKON PRECISION INC·Filed 1996·Granted Oct 20, 1998·1.7k cites·23 claims
- 0299US5528118AGuideless stage with isolated reaction stageNIKON PRECISION INC·Filed 1994·Granted Jun 18, 1996·788 cites·14 claims
- 0398US5623853APrecision motion stage with single guide beam and follower stageNIKON PRECISION INC·Filed 1994·Granted Apr 29, 1997·798 cites·32 claims
- 0495US5760564ADual guide beam stage mechanism with yaw controlNIKON PRECISION INC·Filed 1995·Granted Jun 2, 1998·134 cites·14 claims
- 0594US5453814AIllumination source and method for microlithographyNIKON PRECISION INC·Filed 1994·Granted Sep 26, 1995·110 cites·33 claims
- 0693US5515207AMultiple mirror catadioptric optical systemNIKON PRECISION INC·Filed 1993·Granted May 7, 1996·113 cites·37 claims
- 0791US5552888AApparatus for measuring position of an X-Y stageNIKON PRECISION INC·Filed 1994·Granted Sep 3, 1996·66 cites·29 claims
- 0890US5631731AMethod and apparatus for aerial image analyzerNIKON PRECISION INC·Filed 1994·Granted May 20, 1997·79 cites·38 claims
- 0990US5437946AMultiple reticle stitching for scanning exposure systemNIKON PRECISION INC·Filed 1994·Granted Aug 1, 1995·87 cites·23 claims
- 1084US5866935ATunneling deviceNIKON PRECISION INC·Filed 1996·Granted Feb 2, 1999·44 cites·7 claims
- 1181US5835227AMethod and apparatus for determining performance characteristics in lithographic toolsNIKON PRECISION INC·Filed 1997·Granted Nov 10, 1998·48 cites·54 claims
- 1280US5323263AOff-axis catadioptric projection systemNIKON PRECISION INC·Filed 1993·Granted Jun 21, 1994·96 cites·15 claims
- 1376US6094256AMethod for forming a critical dimension test structure and its useNIKON PRECISION INC·Filed 1998·Granted Jul 25, 2000·29 cites·17 claims
- 1473US5838450ADirect reticle to wafer alignment using fluorescence for integrated circuit lithographyNIKON PRECISION INC·Filed 1995·Granted Nov 17, 1998·34 cites·30 claims
- 1572US4991160AIntegrated optical device for magneto-optical recording and reading headNIKON PRECISION INC·Filed 1990·Granted Feb 5, 1991·22 cites·34 claims
- 1664US5729343AFilm thickness measurement apparatus with tilting stage and method of operationNIKON PRECISION INC·Filed 1996·Granted Mar 17, 1998·27 cites·29 claims
- 1762US5602619AScanner for step and scan lithography systemNIKON PRECISION INC·Filed 1994·Granted Feb 11, 1997·17 cites·32 claims
- 1858US5698069ATechnique for detecting particles on a wafer support surfaceNIKON PRECISION INC·Filed 1996·Granted Dec 16, 1997·20 cites·28 claims
- 1941US5648848ABeam delivery apparatus and method for interferometry using rotatable polarization chucksNIKON PRECISION INC·Filed 1995·Granted Jul 15, 1997·10 cites·18 claims
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