Assignee
NIPPON SILICONE KK
JP·2 granted patents·87 citations·filing 1987–1989
Top patents by PatentIndex Score
2 records- 0187US4897966APolishing apparatusNIPPON SILICONE KK·Filed 1987·Granted Feb 6, 1990·40 cites·2 claims
- 0275US5096854AMethod for polishing a silicon wafer using a ceramic polishing surface having a maximum surface roughness less than 0.02 micronsNIPPON SILICONE KK·Filed 1989·Granted Mar 17, 1992·47 cites·15 claims
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