Assignee
NOVA MEASURING INSTR LTD
IL·139 granted patents·20 pending applications·3,049 citations·filing 1994–2021
Top patents by PatentIndex Score
159 records- 0199US6657736B1Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2000·Granted Dec 2, 2003·178 cites·54 claims
- 0298US6974962B2Lateral shift measurement using an optical techniqueNOVA MEASURING INSTR LTD·Filed 2001·Granted Dec 13, 2005·120 cites·17 claims
- 0398US5604344AAutofocussing microscope having a pattern imaging systemNOVA MEASURING INSTR LTD·Filed 1995·Granted Feb 18, 1997·269 cites·18 claims
- 0498US5517312ADevice for measuring the thickness of thin filmsNOVA MEASURING INSTR LTD·Filed 1994·Granted May 14, 1996·162 cites·7 claims
- 0596US6476920B1Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2000·Granted Nov 5, 2002·153 cites·37 claims
- 0695US9140539B2Optical system and method for measurement of one or more parameters of via-holesNOVA MEASURING INSTR LTD·Filed 2013·Granted Sep 22, 2015·19 cites·20 claims
- 0795US6704920B2Process control for micro-lithographyNOVA MEASURING INSTR LTD·Filed 2001·Granted Mar 9, 2004·101 cites·17 claims
- 0894US7495782B2Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2007·Granted Feb 24, 2009·12 cites·21 claims
- 0994US6603529B1Monitoring apparatus and method particularly useful in photolithographically processing substratesNOVA MEASURING INSTR LTD·Filed 2000·Granted Aug 5, 2003·48 cites·37 claims
- 1094US5764365ATwo-dimensional beam deflectorNOVA MEASURING INSTR LTD·Filed 1996·Granted Jun 9, 1998·106 cites·11 claims
- 1192US10359369B2Metrology test structure design and measurement scheme for measuring in patterned structuresNOVA MEASURING INSTR LTD·Filed 2015·Granted Jul 23, 2019·8 cites·24 claims
- 1292US10216098B2Test structure for use in metrology measurements of patternsNOVA MEASURING INSTR LTD·Filed 2015·Granted Feb 26, 2019·8 cites·18 claims
- 1392US8023122B2Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2010·Granted Sep 20, 2011·6 cites·19 claims
- 1492US7760368B2Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2007·Granted Jul 20, 2010·10 cites·26 claims
- 1592US7477405B2Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2003·Granted Jan 13, 2009·25 cites·96 claims
- 1692US6556947B1Optical measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2000·Granted Apr 29, 2003·79 cites·24 claims
- 1792US6281974B1Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2000·Granted Aug 28, 2001·55 cites·40 claims
- 1892US6166801AMonitoring apparatus and method particularly useful in photolithographically processing substratesNOVA MEASURING INSTR LTD·Filed 1998·Granted Dec 26, 2000·154 cites·20 claims
- 1992US6038029AMethod and apparatus for alignment of a waferNOVA MEASURING INSTR LTD·Filed 1998·Granted Mar 14, 2000·95 cites·15 claims
- 2091US10066936B2Test structures and metrology technique utilizing the test structures for measuring in patterned structuresNOVA MEASURING INSTR LTD·Filed 2015·Granted Sep 4, 2018·8 cites·22 claims
- 2191US7715007B2Lateral shift measurement using an optical techniqueNOVA MEASURING INSTR LTD·Filed 2007·Granted May 11, 2010·11 cites·16 claims
- 2291US6764379B2Method and system for endpoint detectionNOVA MEASURING INSTR LTD·Filed 2000·Granted Jul 20, 2004·27 cites·14 claims
- 2391US6650424B2Method and system for measuring in patterned structuresNOVA MEASURING INSTR LTD·Filed 2001·Granted Nov 18, 2003·43 cites·24 claims
- 2491US6100985AMethod and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 1999·Granted Aug 8, 2000·107 cites·35 claims
- 2590US7289190B2Monitoring apparatus and method particularly useful in photolithographicallyNOVA MEASURING INSTR LTD·Filed 2006·Granted Oct 30, 2007·9 cites·26 claims
- 2689US10161885B2Optical phase measurement method and systemNOVA MEASURING INSTR LTD·Filed 2015·Granted Dec 25, 2018·5 cites·19 claims
- 2789US7791740B2Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2009·Granted Sep 7, 2010·5 cites·10 claims
- 2889US7301163B2Lateral shift measurement using an optical techniqueNOVA MEASURING INSTR LTD·Filed 2006·Granted Nov 27, 2007·9 cites·48 claims
- 2988US11029258B2Optical phase measurement method and systemNOVA MEASURING INSTR LTD·Filed 2018·Granted Jun 8, 2021·2 cites·20 claims
- 3088US7292341B2Optical system operating with variable angle of incidenceNOVA MEASURING INSTR LTD·Filed 2003·Granted Nov 6, 2007·33 cites·3 claims
- 3188US7187456B2Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2005·Granted Mar 6, 2007·11 cites·30 claims
- 3288US7019850B2Method and system for thin film characterizationNOVA MEASURING INSTR LTD·Filed 2002·Granted Mar 28, 2006·27 cites·35 claims
- 3388US6424417B1Method and system for controlling the photolithography processNOVA MEASURING INSTR LTD·Filed 1998·Granted Jul 23, 2002·68 cites·20 claims
- 3488US6212961B1Buffer system for a wafer handling systemNOVA MEASURING INSTR LTD·Filed 1999·Granted Apr 10, 2001·77 cites·6 claims
- 3588US6045433AApparatus for optical inspection of wafers during polishingNOVA MEASURING INSTR LTD·Filed 1995·Granted Apr 4, 2000·91 cites·4 claims
- 3688US5682242AMethod and apparatus for determining a location on a surface of an objectNOVA MEASURING INSTR LTD·Filed 1995·Granted Oct 28, 1997·100 cites·25 claims
- 3787US7864344B1Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2010·Granted Jan 4, 2011·3 cites·10 claims
- 3887US6842220B1Monitoring apparatus and method particularly useful in photolithographically processing substratesNOVA MEASURING INSTR LTD·Filed 2000·Granted Jan 11, 2005·24 cites·21 claims
- 3987US6407809B1Optical inspection system and methodNOVA MEASURING INSTR LTD·Filed 2000·Granted Jun 18, 2002·37 cites·28 claims
- 4087US5867590AMethod and apparatus for determining a location on a surface of an objectNOVA MEASURING INSTR LTD·Filed 1996·Granted Feb 2, 1999·91 cites·18 claims
- 4186US10876959B2Method and system for optical characterization of patterned samplesNOVA MEASURING INSTR LTD·Filed 2018·Granted Dec 29, 2020·2 cites·3 claims
- 4286US7927184B2Method and system for endpoint detectionNOVA MEASURING INSTR LTD·Filed 2009·Granted Apr 19, 2011·6 cites·6 claims
- 4386US7626710B2Method and system for measuring patterned structuresNOVA MEASURING INSTR LTD·Filed 2007·Granted Dec 1, 2009·8 cites·24 claims
- 4486US7614932B2Method and system for endpoint detectionNOVA MEASURING INSTR LTD·Filed 2007·Granted Nov 10, 2009·7 cites·10 claims
- 4586US6426502B1Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereofNOVA MEASURING INSTR LTD·Filed 1999·Granted Jul 30, 2002·63 cites·21 claims
- 4685US10732116B2Hybrid metrology method and systemNOVA MEASURING INSTR LTD·Filed 2016·Granted Aug 4, 2020·2 cites·20 claims
- 4785US10564106B2Raman spectroscopy based measurements in patterned structuresNOVA MEASURING INSTR LTD·Filed 2016·Granted Feb 18, 2020·2 cites·13 claims
- 4884US9291911B2Monitoring apparatus and method particularly useful in photolithographically processing substratesNOVA MEASURING INSTR LTD·Filed 2014·Granted Mar 22, 2016·3 cites·23 claims
- 4984US8941832B2Lateral shift measurement using an optical techniqueNOVA MEASURING INSTR LTD·Filed 2013·Granted Jan 27, 2015·3 cites·10 claims
- 5083US10372845B1Scatterometry system and methodNOVA MEASURING INSTR LTD·Filed 2015·Granted Aug 6, 2019·5 cites·19 claims
Showing the top 50 of 159 patent records by PatentIndex Score.
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