Assignee
NOYA GO
JP·2 granted patents·4 pending applications·15 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0170US9152052B2Composition for forming tungsten oxide film and method for producing tungsten oxide film using sameNOYA GO·Filed 2012·Granted Oct 6, 2015·2 cites·17 claims
- 0269US8101333B2Method for formation of miniaturized pattern and resist substrate treatment solution for use in the methodNOYA GO·Filed 2007·Granted Jan 24, 2012·13 cites·15 claims
- 0343US2010279235A1Composition for formation of top anti-reflective film, and pattern formation method using the compositionNOYA GO·Filed 2008·Application pending·0 cites
- 0440US2010028817A1Solution for treatment of resist substrate after development processing and method for treatment of resist substrate using the sameNOYA GO·Filed 2007·Application pending·0 cites
- 0539US2010003468A1Method of forming microfined resist patternNOYA GO·Filed 2007·Application pending·0 cites
- 0638US2010062363A1Composition for upper surface antireflection film, and method for pattern formation using the sameNOYA GO·Filed 2007·Application pending·0 cites
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