Assignee
NOZAKI KOJI
JP·5 granted patents·101 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0198US8088556B2Thiopyran derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist compositionNOZAKI KOJI·Filed 2010·Granted Jan 3, 2012·46 cites·12 claims
- 0298US8080365B2Thiopyran derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist compositionNOZAKI KOJI·Filed 2010·Granted Dec 20, 2011·46 cites·4 claims
- 0382US8334091B2Resist pattern swelling material, and method for patterning using sameNOZAKI KOJI·Filed 2008·Granted Dec 18, 2012·7 cites·15 claims
- 0467US8420288B2Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the sameNOZAKI KOJI·Filed 2007·Granted Apr 16, 2013·2 cites·7 claims
- 0544US8748077B2Resist pattern improving material, method for forming resist pattern, method for producing semiconductor device, and semiconductor deviceNOZAKI KOJI·Filed 2012·Granted Jun 10, 2014·0 cites·6 claims
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