Assignee
NUFLARE TECHNOLOGY INC
JP·614 granted patents·181 pending applications·1,940 citations·filing 2006–2025
Top patents by PatentIndex Score
795 records- 0197US10572995B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2018·Granted Feb 25, 2020·13 cites·6 claims
- 0296US11461889B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Oct 4, 2022·5 cites·12 claims
- 0396US11139138B2Multiple electron beams irradiation apparatusNUFLARE TECHNOLOGY INC·Filed 2020·Granted Oct 5, 2021·5 cites·10 claims
- 0496US9453721B2Curvature measurement apparatus and methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Sep 27, 2016·20 cites·18 claims
- 0595US10211023B2Aperture set for multi-beam and multi-charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Feb 19, 2019·6 cites·20 claims
- 0695US9518322B2Film formation apparatus and film formation methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Dec 13, 2016·11 cites·12 claims
- 0794US9873941B2Film-forming manufacturing apparatus and methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 23, 2018·5 cites·4 claims
- 0894US7592611B2Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2006·Granted Sep 22, 2009·28 cites·12 claims
- 0993USD1037186SSusceptor ringNUFLARE TECHNOLOGY INC·Filed 2022·Granted Jul 30, 2024·19 cites·1 claims
- 1093US11417495B2Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2021·Granted Aug 16, 2022·2 cites·14 claims
- 1193US10573481B1Electron guns for electron beam toolsNUFLARE TECHNOLOGY INC·Filed 2018·Granted Feb 25, 2020·9 cites·15 claims
- 1293US10550473B2Shower head, vapor phase growth apparatus, and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Feb 4, 2020·3 cites·8 claims
- 1393US9575010B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Feb 21, 2017·6 cites·20 claims
- 1493US8816276B2Electron beam writing apparatus and electron beam writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Aug 26, 2014·17 cites·13 claims
- 1593US7640142B2Position measurement apparatus and method and pattern forming apparatus and writing methodNUFLARE TECHNOLOGY INC·Filed 2006·Granted Dec 29, 2009·550 cites·19 claims
- 1693US7601968B2Charged particle beam writing method and apparatusNUFLARE TECHNOLOGY INC·Filed 2006·Granted Oct 13, 2009·19 cites·15 claims
- 1792US11385192B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Jul 12, 2022·2 cites·18 claims
- 1892US10407772B2Shower head, vapor phase growth apparatus, and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Sep 10, 2019·3 cites·16 claims
- 1992US9869650B2Pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Jan 16, 2018·7 cites·10 claims
- 2092US9373424B2Electron beam writing apparatus and electron beam writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jun 21, 2016·17 cites·9 claims
- 2192US8492732B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2012·Granted Jul 23, 2013·13 cites·15 claims
- 2292US7899953B2Data transfer systemNUFLARE TECHNOLOGY INC·Filed 2008·Granted Mar 1, 2011·27 cites·10 claims
- 2391US12249483B2Charged particle beam writing method and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2022·Granted Mar 11, 2025·2 cites·10 claims
- 2491USD1047884SSusceptor coverNUFLARE TECHNOLOGY INC·Filed 2022·Granted Oct 22, 2024·17 cites·1 claims
- 2591US11145485B2Multiple electron beams irradiation apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted Oct 12, 2021·6 cites·7 claims
- 2691US10134565B2Multi charged particle beam exposure method and multi charged particle beam exposure apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Nov 20, 2018·4 cites·10 claims
- 2791US9922415B2Inspection method, inspection apparatus, and inspection systemNUFLARE TECHNOLOGY INC·Filed 2016·Granted Mar 20, 2018·6 cites·11 claims
- 2891US9558315B2Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 31, 2017·8 cites·20 claims
- 2991US9535015B2Pattern inspection method and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Jan 3, 2017·15 cites·13 claims
- 3091US7740991B2Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beamNUFLARE TECHNOLOGY INC·Filed 2006·Granted Jun 22, 2010·19 cites·18 claims
- 3191US7643130B2Position measuring apparatus and positional deviation measuring methodNUFLARE TECHNOLOGY INC·Filed 2006·Granted Jan 5, 2010·19 cites·20 claims
- 3291US7525110B2Multiple irradiation effect-corrected dose determination technique for charged particle beam lithographyNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 28, 2009·14 cites·17 claims
- 3391US7511290B2Charged particle beam writing method and apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Mar 31, 2009·16 cites·19 claims
- 3490US10593505B1Low temperature, high-brightness, cathodeNUFLARE TECHNOLOGY INC·Filed 2018·Granted Mar 17, 2020·5 cites·18 claims
- 3590US10281415B2Pattern inspection method and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2016·Granted May 7, 2019·9 cites·10 claims
- 3690US8352889B2Beam dose computing method and writing method and record carrier body and writing apparatusNUFLARE TECHNOLOGY INC·Filed 2011·Granted Jan 8, 2013·5 cites·5 claims
- 3790US7834333B2Charged particle beam lithography system and method for evaluating the sameNUFLARE TECHNOLOGY INC·Filed 2007·Granted Nov 16, 2010·13 cites·14 claims
- 3890US7662522B2Method for manufacturing semiconductor devices, and method for forming a pattern onto an exposure maskNUFLARE TECHNOLOGY INC·Filed 2008·Granted Feb 16, 2010·11 cites·12 claims
- 3989US9869035B2Vapor phase growth apparatus and vapor phase growth methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 16, 2018·3 cites·8 claims
- 4089US9790620B1Method of reducing work function in carbon coated LaB6 cathodesNUFLARE TECHNOLOGY INC·Filed 2017·Granted Oct 17, 2017·5 cites·9 claims
- 4189US9275824B2Multi charged particle beam writing method, and multi charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Mar 1, 2016·5 cites·10 claims
- 4288US11538658B2Theta stage mechanism and electron beam inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2021·Granted Dec 27, 2022·1 cites·10 claims
- 4388US10790110B2Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted Sep 29, 2020·3 cites·10 claims
- 4488US9624603B2Vapor phase growth apparatus having shower plate with multi gas flow passages and vapor phase growth method using the sameNUFLARE TECHNOLOGY INC·Filed 2014·Granted Apr 18, 2017·4 cites·11 claims
- 4588US9177372B2Defect estimation device and method and inspection system and methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 3, 2015·5 cites·4 claims
- 4688US9082588B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jul 14, 2015·7 cites·8 claims
- 4788US8552405B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2012·Granted Oct 8, 2013·8 cites·15 claims
- 4888US7863586B2Writing data creation method and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2008·Granted Jan 4, 2011·10 cites·9 claims
- 4988US7750324B2Charged particle beam lithography apparatus and charged particle beam lithography methodNUFLARE TECHNOLOGY INC·Filed 2008·Granted Jul 6, 2010·12 cites·10 claims
- 5088US7698682B2Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 13, 2010·12 cites·11 claims
Showing the top 50 of 795 patent records by PatentIndex Score.
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