Assignee
NUMAKURA MASAHIRO
JP·2 granted patents·7 citations·filing 2005–2008
Top patents by PatentIndex Score
2 records- 0172US8571703B2System, method and storage medium for controlling a processing systemNUMAKURA MASAHIRO·Filed 2008·Granted Oct 29, 2013·5 cites·12 claims
- 0261US9305814B2Method of inspecting substrate processing apparatus and storage medium storing inspection program for executing the methodNUMAKURA MASAHIRO·Filed 2005·Granted Apr 5, 2016·2 cites·6 claims
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