Assignee
NUMERICAL TECH INC
US·70 granted patents·7 pending applications·6,144 citations·filing 1997–2003
Top patents by PatentIndex Score
77 records- 0199US6777138B2Mask product made by selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabricat layoutNUMERICAL TECH INC·Filed 2002·Granted Aug 17, 2004·209 cites·4 claims
- 0299US6687895B2Method and apparatus for reducing optical proximity correction output file sizeNUMERICAL TECH INC·Filed 2002·Granted Feb 3, 2004·296 cites·32 claims
- 0399US6453457B1Selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabrication layoutNUMERICAL TECH INC·Filed 2000·Granted Sep 17, 2002·277 cites·76 claims
- 0499US6370679B1Data hierarchy layout correction and verification method and apparatusNUMERICAL TECH INC·Filed 1998·Granted Apr 9, 2002·498 cites·100 claims
- 0599US5858580APhase shifting circuit manufacture method and apparatusNUMERICAL TECH INC·Filed 1997·Granted Jan 12, 1999·553 cites·12 claims
- 0698US6787271B2Design and layout of phase shifting photolithographic masksNUMERICAL TECH INC·Filed 2002·Granted Sep 7, 2004·84 cites·27 claims
- 0798US6665856B1Displacing edge segments on a fabrication layout based on proximity effects model amplitudes for correcting proximity effectsNUMERICAL TECH INC·Filed 2000·Granted Dec 16, 2003·115 cites·60 claims
- 0898US6470489B1Design rule checking system and methodNUMERICAL TECH INC·Filed 1998·Granted Oct 22, 2002·516 cites·11 claims
- 0998US6258493B1Phase shifting circuit manufacture method and apparatusNUMERICAL TECH INC·Filed 2000·Granted Jul 10, 2001·101 cites·64 claims
- 1097US6807663B2Accelerated layout processing using OPC pre-processingNUMERICAL TECH INC·Filed 2002·Granted Oct 19, 2004·230 cites·26 claims
- 1197US6792590B1Dissection of edges with projection points in a fabrication layout for correcting proximity effectsNUMERICAL TECH INC·Filed 2000·Granted Sep 14, 2004·78 cites·36 claims
- 1297US6757645B2Visual inspection and verification systemNUMERICAL TECH INC·Filed 1998·Granted Jun 29, 2004·207 cites·64 claims
- 1397US6745372B2Method and apparatus for facilitating process-compliant layout optimizationNUMERICAL TECH INC·Filed 2002·Granted Jun 1, 2004·243 cites·32 claims
- 1497US6625801B1Dissection of printed edges from a fabrication layout for correcting proximity effectsNUMERICAL TECH INC·Filed 2000·Granted Sep 23, 2003·91 cites·16 claims
- 1596US6753115B2Facilitating minimum spacing and/or width control optical proximity correctionNUMERICAL TECH INC·Filed 2001·Granted Jun 22, 2004·76 cites·32 claims
- 1696US6539521B1Dissection of corners in a fabrication layout for correcting proximity effectsNUMERICAL TECH INC·Filed 2000·Granted Mar 25, 2003·84 cites·40 claims
- 1796US6505327B2Generating an instance-based representation of a design hierarchyNUMERICAL TECH INC·Filed 2001·Granted Jan 7, 2003·346 cites·28 claims
- 1896US6228539B1Phase shifting circuit manufacture method and apparatusNUMERICAL TECH INC·Filed 1999·Granted May 8, 2001·108 cites·28 claims
- 1995US6733929B2Phase shift masking for complex patterns with proximity adjustmentsNUMERICAL TECH INC·Filed 2002·Granted May 11, 2004·61 cites·37 claims
- 2095US6684382B2Microloading effect correctionNUMERICAL TECH INC·Filed 2001·Granted Jan 27, 2004·72 cites·16 claims
- 2195US6557162B1Method for high yield reticle formationNUMERICAL TECH INC·Filed 2000·Granted Apr 29, 2003·49 cites·45 claims
- 2295US6523165B2Alternating phase shift mask design conflict resolutionNUMERICAL TECH INC·Filed 2001·Granted Feb 18, 2003·85 cites·26 claims
- 2395US6436590B2Phase shifting circuit manufacture method and apparatusNUMERICAL TECH INC·Filed 2001·Granted Aug 20, 2002·82 cites·5 claims
- 2494US6721938B2Optical proximity correction for phase shifting photolithographic masksNUMERICAL TECH INC·Filed 2002·Granted Apr 13, 2004·62 cites·53 claims
- 2594US6670082B2System and method for correcting 3D effects in an alternating phase-shifting maskNUMERICAL TECH INC·Filed 2001·Granted Dec 30, 2003·54 cites·24 claims
- 2694US6584609B1Method and apparatus for mixed-mode optical proximity correctionNUMERICAL TECH INC·Filed 2000·Granted Jun 24, 2003·99 cites·16 claims
- 2794US6578188B1Method and apparatus for a network-based mask defect printability analysis systemNUMERICAL TECH INC·Filed 2000·Granted Jun 10, 2003·166 cites·36 claims
- 2894US6541165B1Phase shift mask sub-resolution assist featuresNUMERICAL TECH INC·Filed 2000·Granted Apr 1, 2003·57 cites·21 claims
- 2993US6503666B1Phase shift masking for complex patternsNUMERICAL TECH INC·Filed 2000·Granted Jan 7, 2003·48 cites·51 claims
- 3093US6453452B1Method and apparatus for data hierarchy maintenance in a system for mask descriptionNUMERICAL TECH INC·Filed 1998·Granted Sep 17, 2002·186 cites·92 claims
- 3192US6763514B2Method and apparatus for controlling rippling during optical proximity correctionNUMERICAL TECH INC·Filed 2001·Granted Jul 13, 2004·39 cites·30 claims
- 3292US6653026B2Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting maskNUMERICAL TECH INC·Filed 2000·Granted Nov 25, 2003·37 cites·56 claims
- 3392US6560766B2Method and apparatus for analyzing a layout using an instance-based representationNUMERICAL TECH INC·Filed 2001·Granted May 6, 2003·82 cites·39 claims
- 3491US6566019B2Using double exposure effects during phase shifting to control line end shorteningNUMERICAL TECH INC·Filed 2001·Granted May 20, 2003·46 cites·31 claims
- 3591US6523162B1General purpose shape-based layout processing scheme for IC layout modificationsNUMERICAL TECH INC·Filed 2000·Granted Feb 18, 2003·108 cites·54 claims
- 3690US6901575B2Resolving phase-shift conflicts in layouts using weighted links between phase shiftersNUMERICAL TECH INC·Filed 2001·Granted May 31, 2005·34 cites·29 claims
- 3790US6785879B2Model-based data conversionNUMERICAL TECH INC·Filed 2002·Granted Aug 31, 2004·30 cites·24 claims
- 3890US6658640B2Simulation-based feed forward process controlNUMERICAL TECH INC·Filed 2001·Granted Dec 2, 2003·85 cites·15 claims
- 3990US6524752B1Phase shift masking for intersecting linesNUMERICAL TECH INC·Filed 2000·Granted Feb 25, 2003·31 cites·93 claims
- 4089US6584610B1Incrementally resolved phase-shift conflicts in layouts for phase-shifted featuresNUMERICAL TECH INC·Filed 2001·Granted Jun 24, 2003·47 cites·19 claims
- 4188US6698007B2Method and apparatus for resolving coloring conflicts between phase shiftersNUMERICAL TECH INC·Filed 2001·Granted Feb 24, 2004·42 cites·39 claims
- 4288US6569583B2Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflictsNUMERICAL TECH INC·Filed 2001·Granted May 27, 2003·33 cites·24 claims
- 4387US6681379B2Phase shifting design and layout for static random access memoryNUMERICAL TECH INC·Filed 2001·Granted Jan 20, 2004·29 cites·24 claims
- 4486US6795168B2Method and apparatus for exposing a wafer using multiple masks during an integrated circuit manufacturing processNUMERICAL TECH INC·Filed 2002·Granted Sep 21, 2004·27 cites·10 claims
- 4586US6635393B2Blank for alternating PSM photomask with charge dissipation layerNUMERICAL TECH INC·Filed 2001·Granted Oct 21, 2003·26 cites·43 claims
- 4685US6777141B2Phase shift mask including sub-resolution assist features for isolated spacesNUMERICAL TECH INC·Filed 2002·Granted Aug 17, 2004·20 cites·21 claims
- 4782US6852471B2Exposure control for phase shifting photolithographic masksNUMERICAL TECH INC·Filed 2001·Granted Feb 8, 2005·15 cites·11 claims
- 4881US6794096B2Phase shifting mask topography effect correction based on near-field image propertiesNUMERICAL TECH INC·Filed 2002·Granted Sep 21, 2004·19 cites·20 claims
- 4981US6551750B2Self-aligned fabrication technique for tri-tone attenuated phase-shifting masksNUMERICAL TECH INC·Filed 2001·Granted Apr 22, 2003·17 cites·52 claims
- 5079US6553560B2Alleviating line end shortening in transistor endcaps by extending phase shiftersNUMERICAL TECH INC·Filed 2001·Granted Apr 22, 2003·19 cites·56 claims
Showing the top 50 of 77 patent records by PatentIndex Score.
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