Assignee
NUMERICAL TECHNOLOGIES
US·5 granted patents·50 citations·filing 2002–2003
Top patents by PatentIndex Score
5 records- 0169US6846617B2Facilitating optical proximity effect correction through pupil filteringNUMERICAL TECHNOLOGIES·Filed 2002·Granted Jan 25, 2005·9 cites·31 claims
- 0268US6795955B2Method and apparatus for identifying an identical cell in an IC layout with an existing solutionNUMERICAL TECHNOLOGIES·Filed 2002·Granted Sep 21, 2004·12 cites·23 claims
- 0366US6821689B2Using second exposure to assist a PSM exposure in printing a tight space adjacent to large featureNUMERICAL TECHNOLOGIES·Filed 2002·Granted Nov 23, 2004·10 cites·26 claims
- 0464US6887630B2Method and apparatus for fracturing polygons on masks used in an optical lithography processNUMERICAL TECHNOLOGIES·Filed 2003·Granted May 3, 2005·12 cites·20 claims
- 0562US6859918B2Alleviating line end shortening by extending phase shiftersNUMERICAL TECHNOLOGIES·Filed 2002·Granted Feb 22, 2005·7 cites·18 claims
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