Assignee
NYHUS PAUL A
US·5 granted patents·14 citations·filing 2011–2015
Top patents by PatentIndex Score
5 records- 0191US9054215B2Patterning of vertical nanowire transistor channel and gate with directed self assemblyNYHUS PAUL A·Filed 2012·Granted Jun 9, 2015·9 cites·23 claims
- 0271US9153477B2Directed self assembly of block copolymers to form vias aligned with interconnectsNYHUS PAUL A·Filed 2012·Granted Oct 6, 2015·3 cites·11 claims
- 0367US9530688B2Directed self assembly of block copolymers to form vias aligned with interconnectsNYHUS PAUL A·Filed 2015·Granted Dec 27, 2016·1 cites·14 claims
- 0466US8959465B2Techniques for phase tuning for process optimizationNYHUS PAUL A·Filed 2011·Granted Feb 17, 2015·1 cites·23 claims
- 0552US9625815B2Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and pluggingNYHUS PAUL A·Filed 2013·Granted Apr 18, 2017·0 cites·3 claims
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