Assignee
O'HARA ANTHONY
GB·2 granted patents·2 pending applications·62 citations·filing 2005–2012
Top patents by PatentIndex Score
4 records- 0192US8679354B2Method of etching a sacrificial silicon oxide layerO'HARA ANTHONY·Filed 2007·Granted Mar 25, 2014·62 cites·16 claims
- 0238US9786526B2Selectivity in a xenon difluoride etch processO'HARA ANTHONY·Filed 2010·Granted Oct 10, 2017·0 cites·6 claims
- 0335US2014308822A1Deposition technique for depositing a coating on a deviceO'HARA ANTHONY·Filed 2012·Application pending·0 cites
- 0434US2008035607A1Method and Apparatus for the Etching of MicrostructuresO'HARA ANTHONY·Filed 2005·Application pending·0 cites
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