Assignee
OC OERLIKON BALZERS AG
LI·40 granted patents·26 pending applications·313 citations·filing 1997–2013
Top patents by PatentIndex Score
66 records- 0197US7348074B2Multilayer hard coating for toolsOC OERLIKON BALZERS AG·Filed 2005·Granted Mar 25, 2008·58 cites·16 claims
- 0295US7226670B2Work piece with a hard film of AlCr-containing material, and process for its productionOC OERLIKON BALZERS AG·Filed 2004·Granted Jun 5, 2007·65 cites·22 claims
- 0391US7784426B2Plasma reactor for the treatment of large size substratesOC OERLIKON BALZERS AG·Filed 2007·Granted Aug 31, 2010·10 cites·6 claims
- 0486US7368041B2Method for controlling plasma density or the distribution thereofOC OERLIKON BALZERS AG·Filed 2004·Granted May 6, 2008·19 cites·49 claims
- 0585US7678240B2Method for controlling plasma density or the distribution thereofOC OERLIKON BALZERS AG·Filed 2008·Granted Mar 16, 2010·6 cites·15 claims
- 0683US7492091B2Diffusion barrier layer and method for manufacturing a diffusion barrier layerOC OERLIKON BALZERS AG·Filed 2005·Granted Feb 17, 2009·18 cites·6 claims
- 0781US10692707B2RF substrate bias with high power impulse magnetron sputtering (HIPIMS)OC OERLIKON BALZERS AG·Filed 2013·Granted Jun 23, 2020·3 cites·12 claims
- 0877US9694990B2Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substratesOC OERLIKON BALZERS AG·Filed 2013·Granted Jul 4, 2017·5 cites·12 claims
- 0976US7295392B2Color wheel with aligned segmentsOC OERLIKON BALZERS AG·Filed 2006·Granted Nov 13, 2007·8 cites·9 claims
- 1072US7244086B2Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substratesOC OERLIKON BALZERS AG·Filed 2003·Granted Jul 17, 2007·17 cites·9 claims
- 1172US7227633B2Optical substrate for enhanced detectability of fluorescenceOC OERLIKON BALZERS AG·Filed 2004·Granted Jun 5, 2007·10 cites·21 claims
- 1272US7155115B2Method and device for vacuum sputteringOC OERLIKON BALZERS AG·Filed 2002·Granted Dec 26, 2006·9 cites·10 claims
- 1372US7148610B2Surface acoustic wave device having improved performance and method of making the deviceOC OERLIKON BALZERS AG·Filed 2002·Granted Dec 12, 2006·19 cites·31 claims
- 1471US7335521B2Method for the production of multilayer discsOC OERLIKON BALZERS AG·Filed 2005·Granted Feb 26, 2008·5 cites·11 claims
- 1569US7405819B2Optical substrate for enhanced detectability of fluorescenceOC OERLIKON BALZERS AG·Filed 2007·Granted Jul 29, 2008·5 cites·16 claims
- 1667US7413310B2Spectral light division and recombination configuration as well as process for the spectrally selective modulation of lightOC OERLIKON BALZERS AG·Filed 2002·Granted Aug 19, 2008·8 cites·9 claims
- 1765US7138343B2Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamberOC OERLIKON BALZERS AG·Filed 2003·Granted Nov 21, 2006·7 cites·22 claims
- 1864US7736462B2Installation for processing a substrateOC OERLIKON BALZERS AG·Filed 2004·Granted Jun 15, 2010·9 cites·32 claims
- 1962US7706908B2Method for positioning a waferOC OERLIKON BALZERS AG·Filed 2006·Granted Apr 27, 2010·4 cites·19 claims
- 2062US2008210549A1Method and apparatus for manufacturing a substrate with a magnetron sputter coatingOC OERLIKON BALZERS AG·Filed 2008·Application pending·0 cites
- 2160US7718042B2Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such sourceOC OERLIKON BALZERS AG·Filed 2004·Granted May 18, 2010·4 cites·15 claims
- 2259US9593407B2Direct liquid depositionOC OERLIKON BALZERS AG·Filed 2012·Granted Mar 14, 2017·0 cites·18 claims
- 2358US7429543B2Method for the production of a substrateOC OERLIKON BALZERS AG·Filed 2006·Granted Sep 30, 2008·0 cites·21 claims
- 2458US7285789B2Optical device for surface-generated fluorescenceOC OERLIKON BALZERS AG·Filed 2004·Granted Oct 23, 2007·2 cites·31 claims
- 2555US7153363B2Atomic layer depositionOC OERLIKON BALZERS AG·Filed 2004·Granted Dec 26, 2006·1 cites·5 claims
- 2655US2009252892A1Processing chamberOC OERLIKON BALZERS AG·Filed 2009·Application pending·0 cites
- 2754US7420740B2Device for combination of light of different wavelengthsOC OERLIKON BALZERS AG·Filed 2005·Granted Sep 2, 2008·1 cites·6 claims
- 2854US7405095B2Method for producing color-wheel segmentsOC OERLIKON BALZERS AG·Filed 2005·Granted Jul 29, 2008·1 cites·15 claims
- 2952US7420449B2Mirror actuating device for projection systemsOC OERLIKON BALZERS AG·Filed 2007·Granted Sep 2, 2008·1 cites·6 claims
- 3052US7179352B2Vacuum treatment system and process for manufacturing workpiecesOC OERLIKON BALZERS AG·Filed 2004·Granted Feb 20, 2007·1 cites·6 claims
- 3152US7105080B2Vacuum treatment system and method of manufacturing sameOC OERLIKON BALZERS AG·Filed 2002·Granted Sep 12, 2006·2 cites·29 claims
- 3252US2008308412A1Multitarget sputter source and method for the deposition of multi-layersOC OERLIKON BALZERS AG·Filed 2008·Application pending·0 cites
- 3351US2007154649A1Method for producing a space layer in between two disks with high uniformityOC OERLIKON BALZERS AG·Filed 2006·Application pending·0 cites
- 3450US7381661B2Method for the production of a substrate with a magnetron sputter coating and unit for the sameOC OERLIKON BALZERS AG·Filed 2003·Granted Jun 3, 2008·1 cites·42 claims
- 3550US7371329B2Method for filtering particles from a fluidOC OERLIKON BALZERS AG·Filed 2006·Granted May 13, 2008·3 cites·6 claims
- 3650US2007175748A1Method of manufacturing at least one sputter-coated substrate and sputter sourceOC OERLIKON BALZERS AG·Filed 2006·Application pending·0 cites
- 3749US2007224385A1Wavelength selective dielectric filter and its application to optical disksOC OERLIKON BALZERS AG·Filed 2007·Application pending·0 cites
- 3849US2013167921A1Double layer antireflection coating for silicon based solar cell modulesOC OERLIKON BALZERS AG·Filed 2013·Application pending·0 cites
- 3948US7760436B2Method for combination of light of different wavelengthsOC OERLIKON BALZERS AG·Filed 2008·Granted Jul 20, 2010·0 cites·6 claims
- 4048US2008035169A1Cleaning means for large area pecvd devices using a remote plasma sourceOC OERLIKON BALZERS AG·Filed 2006·Application pending·0 cites
- 4148US2008053620A1Method for the bonding of disk-shaped substrates and apparatus for carrying out the methodOC OERLIKON BALZERS AG·Filed 2007·Application pending·0 cites
- 4247USRE40192EVacuum process apparatusOC OERLIKON BALZERS AG·Filed 2000·Granted Apr 1, 2008·1 cites·50 claims
- 4347US7169252B2Method for the assembly of light integratorsOC OERLIKON BALZERS AG·Filed 2004·Granted Jan 30, 2007·6 cites·6 claims
- 4447US2007007357A1Wavelength-selective metal dielectric filter and its application to optical discsOC OERLIKON BALZERS AG·Filed 2006·Application pending·0 cites
- 4547US2008163817A1Apparatus for gas handling in vacuum processesOC OERLIKON BALZERS AG·Filed 2008·Application pending·0 cites
- 4647US2008038095A1Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substratesOC OERLIKON BALZERS AG·Filed 2007·Application pending·0 cites
- 4746US2007187040A1Method and device for holding and centering of substratesOC OERLIKON BALZERS AG·Filed 2007·Application pending·0 cites
- 4846US2007252529A1Capacitively Coupled Rf-Plasma ReactorOC OERLIKON BALZERS AG·Filed 2005·Application pending·0 cites
- 4945US2009087998A1Diffusion barrier layer and method for manufacturing a diffusion barrier layerOC OERLIKON BALZERS AG·Filed 2008·Application pending·0 cites
- 5045US2007279779A1Color wheelOC OERLIKON BALZERS AG·Filed 2007·Application pending·0 cites
Showing the top 50 of 66 patent records by PatentIndex Score.
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