Assignee
OHATA MITSUNORI
US·2 granted patents·29 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0193US9076636B2Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the methodOHATA MITSUNORI·Filed 2011·Granted Jul 7, 2015·29 cites·5 claims
- 0244US8084720B2High rate method for stable temperature control of a substrateOHATA MITSUNORI·Filed 2010·Granted Dec 27, 2011·0 cites·13 claims
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