Assignee
OHKUBO AKINORI
US·5 granted patents·15 citations·filing 2007–2011
Top patents by PatentIndex Score
5 records- 0184US9091614B2Wavefront optical measuring apparatusOHKUBO AKINORI·Filed 2011·Granted Jul 28, 2015·7 cites·14 claims
- 0278US8085384B2Exposure apparatusOHKUBO AKINORI·Filed 2007·Granted Dec 27, 2011·5 cites·6 claims
- 0359US8223313B2Light intensity distribution measurement apparatus and measurement method, and exposure apparatusOHKUBO AKINORI·Filed 2009·Granted Jul 17, 2012·1 cites·8 claims
- 0456US8139215B2Method for measuring polarization characteristics and measurement apparatusOHKUBO AKINORI·Filed 2009·Granted Mar 20, 2012·2 cites·7 claims
- 0544US8314938B2Method and apparatus for measuring surface profile of an objectOHKUBO AKINORI·Filed 2010·Granted Nov 20, 2012·0 cites·16 claims
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