Assignee
OHMI TADAHIRO
JP·171 granted patents·53 pending applications·4,544 citations·filing 1987–2016
Top patents by PatentIndex Score
224 records- 0199US6035893AShutoff-opening devices and fluid control apparatus comprising such devicesOHMI TADAHIRO·Filed 1997·Granted Mar 14, 2000·143 cites·6 claims
- 0298US6446573B2Plasma process deviceOHMI TADAHIRO·Filed 2001·Granted Sep 10, 2002·572 cites·13 claims
- 0398US5272417ADevice for plasma processOHMI TADAHIRO·Filed 1990·Granted Dec 21, 1993·287 cites·3 claims
- 0497US8114245B2Plasma etching deviceOHMI TADAHIRO·Filed 2002·Granted Feb 14, 2012·157 cites·12 claims
- 0597US6585851B1Plasma etching deviceOHMI TADAHIRO·Filed 1998·Granted Jul 1, 2003·178 cites·26 claims
- 0697US6257270B1Fluid control deviceOHMI TADAHIRO·Filed 1999·Granted Jul 10, 2001·91 cites·1 claims
- 0796US5975112AFluid control deviceOHMI TADAHIRO·Filed 1997·Granted Nov 2, 1999·85 cites·4 claims
- 0895US6551948B2Flash memory device and a fabrication process thereof, method of forming a dielectric filmOHMI TADAHIRO·Filed 2001·Granted Apr 22, 2003·57 cites·16 claims
- 0995US5009963AMetal material with film passivated by fluorination and apparatus composed of the metal materialOHMI TADAHIRO·Filed 1989·Granted Apr 23, 1991·71 cites·6 claims
- 1095US4824546ASemiconductor manufacturing apparatusOHMI TADAHIRO·Filed 1987·Granted Apr 25, 1989·67 cites·12 claims
- 1194US8724974B2VaporizerOHMI TADAHIRO·Filed 2012·Granted May 13, 2014·9 cites·16 claims
- 1294US8146924B2Low-compression force metal gasketsOHMI TADAHIRO·Filed 2008·Granted Apr 3, 2012·22 cites·7 claims
- 1394US7663195B2P-channel power MIS field effect transistor and switching circuitOHMI TADAHIRO·Filed 2005·Granted Feb 16, 2010·31 cites·17 claims
- 1494US5983933AShutoff-opening deviceOHMI TADAHIRO·Filed 1997·Granted Nov 16, 1999·85 cites·4 claims
- 1593US8399862B2Ion implanting apparatus and ion implanting methodOHMI TADAHIRO·Filed 2007·Granted Mar 19, 2013·20 cites·19 claims
- 1693US6039360ACouplings for fluid controllersOHMI TADAHIRO·Filed 1998·Granted Mar 21, 2000·82 cites·6 claims
- 1793US5110438AReduced pressure surface treatment apparatusOHMI TADAHIRO·Filed 1989·Granted May 5, 1992·113 cites·3 claims
- 1893US4874494ASemiconductor manufacturing apparatusOHMI TADAHIRO·Filed 1987·Granted Oct 17, 1989·81 cites·5 claims
- 1992US6975018B2Semiconductor deviceOHMI TADAHIRO·Filed 2001·Granted Dec 13, 2005·49 cites·4 claims
- 2092US6394415B1Fluid control valve and fluid supply/exhaust systemOHMI TADAHIRO·Filed 2000·Granted May 28, 2002·43 cites·18 claims
- 2192US6357385B1Plasma deviceOHMI TADAHIRO·Filed 1998·Granted Mar 19, 2002·124 cites·33 claims
- 2292US5021843ASemiconductor integrated circuitOHMI TADAHIRO·Filed 1989·Granted Jun 4, 1991·68 cites·8 claims
- 2391US8124240B2Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structureOHMI TADAHIRO·Filed 2006·Granted Feb 28, 2012·10 cites·10 claims
- 2491US7521324B2Semiconductor device and method for manufacturing the sameOHMI TADAHIRO·Filed 2004·Granted Apr 21, 2009·51 cites·11 claims
- 2591US4907053ASemiconductor integrated circuitOHMI TADAHIRO·Filed 1987·Granted Mar 6, 1990·60 cites·36 claims
- 2690US8679369B2Film-forming material and method for predicting film-forming materialOHMI TADAHIRO·Filed 2012·Granted Mar 25, 2014·4 cites·4 claims
- 2790US6669825B2Method of forming a dielectric filmOHMI TADAHIRO·Filed 2001·Granted Dec 30, 2003·28 cites·13 claims
- 2889US6450190B2Method of detecting abnormalities in flow rate in pressure-type flow controllerOHMI TADAHIRO·Filed 2001·Granted Sep 17, 2002·57 cites·5 claims
- 2989US4897171AWafer susceptorOHMI TADAHIRO·Filed 1988·Granted Jan 30, 1990·89 cites·8 claims
- 3088US8418714B2Flow rate range variable type flow rate control apparatusOHMI TADAHIRO·Filed 2006·Granted Apr 16, 2013·16 cites·4 claims
- 3187US7416165B2Diaphragm valve for the vacuum exhaustion systemOHMI TADAHIRO·Filed 2004·Granted Aug 26, 2008·34 cites·9 claims
- 3287US6818852B2Microwave plasma processing device, plasma processing method, and microwave radiating memberOHMI TADAHIRO·Filed 2002·Granted Nov 16, 2004·39 cites·20 claims
- 3387US5714795ASemiconductor device utilizing silicide reactionOHMI TADAHIRO·Filed 1995·Granted Feb 3, 1998·89 cites·37 claims
- 3486US8714188B2Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is usedOHMI TADAHIRO·Filed 2011·Granted May 6, 2014·7 cites·2 claims
- 3586US6146135AOxide film forming methodOHMI TADAHIRO·Filed 1996·Granted Nov 14, 2000·54 cites·9 claims
- 3685US9476137B2Metal oxide film, laminate, metal member and process for producing the sameOHMI TADAHIRO·Filed 2012·Granted Oct 25, 2016·6 cites·11 claims
- 3785US8282807B2Metal member having a metal oxide film and method of manufacturing the sameOHMI TADAHIRO·Filed 2007·Granted Oct 9, 2012·4 cites·24 claims
- 3885US5415718AReactive ion etching deviceOHMI TADAHIRO·Filed 1991·Granted May 16, 1995·61 cites·8 claims
- 3984US9133951B2Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employedOHMI TADAHIRO·Filed 2006·Granted Sep 15, 2015·14 cites·11 claims
- 4084US8206833B2Metal oxide film, laminate, metal member and process for producing the sameOHMI TADAHIRO·Filed 2006·Granted Jun 26, 2012·8 cites·13 claims
- 4184US6170890B1Pipe jointOHMI TADAHIRO·Filed 1998·Granted Jan 9, 2001·53 cites·4 claims
- 4282US7520245B2Plasma processing apparatusOHMI TADAHIRO·Filed 2004·Granted Apr 21, 2009·17 cites·8 claims
- 4381US5990060ACleaning liquid and cleaning methodOHMI TADAHIRO·Filed 1998·Granted Nov 23, 1999·46 cites·22 claims
- 4480US8535494B2Rotary magnet sputtering apparatusOHMI TADAHIRO·Filed 2009·Granted Sep 17, 2013·5 cites·6 claims
- 4580US6150851ACharge transfer amplifier circuit, voltage comparator, and sense amplifierOHMI TADAHIRO·Filed 1998·Granted Nov 21, 2000·44 cites·16 claims
- 4679US6949478B2Oxide film forming methodOHMI TADAHIRO·Filed 2002·Granted Sep 27, 2005·13 cites·18 claims
- 4779US6153068AParallel plate sputtering device with RF powered auxiliary electrodes and applied external magnetic fieldOHMI TADAHIRO·Filed 1998·Granted Nov 28, 2000·34 cites·2 claims
- 4879US5923693ADischarge electrode, shape-restoration thereof, excimer laser oscillator, and stepperOHMI TADAHIRO·Filed 1997·Granted Jul 13, 1999·45 cites·9 claims
- 4978US8183670B2Semiconductor device and method of manufacturing the sameOHMI TADAHIRO·Filed 2007·Granted May 22, 2012·4 cites·4 claims
- 5078US5487398ARotary cleaning method with chemical solutions and rotary cleaning apparatus with chemical solutionsOHMI TADAHIRO·Filed 1994·Granted Jan 30, 1996·97 cites·14 claims
Showing the top 50 of 224 patent records by PatentIndex Score.
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