Assignee

OKI SEMICONDUCTOR AN OPERATING

US·1 granted patent·17 citations·filing 1996–1996

Technology mixG06F1 H10W1 Y10S1

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0149US5767011AFabrication method for integrated circuitsOKI SEMICONDUCTOR AN OPERATING·Filed 1996·Granted Jun 16, 1998·17 cites·21 claims

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