Assignee
OKORN-SCHMIDT HARALD
AT·3 granted patents·2 citations·filing 2010–2014
Top patents by PatentIndex Score
3 records- 0166US8709165B2Method and apparatus for surface treatment using inorganic acid and ozoneOKORN-SCHMIDT HARALD·Filed 2010·Granted Apr 29, 2014·2 cites·7 claims
- 0251US9653328B2Method and apparatus for surface treatment using inorganic acid and ozoneOKORN-SCHMIDT HARALD·Filed 2014·Granted May 16, 2017·0 cites·14 claims
- 0340US8668777B2Process for treating a semiconductor waferOKORN-SCHMIDT HARALD·Filed 2010·Granted Mar 11, 2014·0 cites·20 claims
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