Assignee
OLGADO DONALD J K
US·1 granted patent·7 pending applications·31 citations·filing 2007–2012
Top patents by PatentIndex Score
8 records- 0195US9057128B2Multiple level showerhead designOLGADO DONALD J K·Filed 2012·Granted Jun 16, 2015·31 cites·20 claims
- 0249US2013087093A1Apparatus and method for hvpe processing using a plasmaOLGADO DONALD J K·Filed 2012·Application pending·0 cites
- 0347US2012064698A1Multiple section showerhead assemblyOLGADO DONALD J K·Filed 2011·Application pending·0 cites
- 0447US2012009765A1Compartmentalized chamberOLGADO DONALD J K·Filed 2011·Application pending·0 cites
- 0542US2008155852A1Multiple substrate vapor drying systems and methodsOLGADO DONALD J K·Filed 2007·Application pending·0 cites
- 0642US2008156359A1Systems and methods for modular and configurable substrate cleaningOLGADO DONALD J K·Filed 2007·Application pending·0 cites
- 0737US2012234243A1Method and apparatus utilizing a single lift mechanism for processing and transfer of substratesOLGADO DONALD J K·Filed 2012·Application pending·0 cites
- 0837US2012108081A1Apparatus having improved substrate temperature uniformity using direct heating methodsOLGADO DONALD J K·Filed 2011·Application pending·0 cites
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