Assignee
ON LINE TECHN INC
US·12 granted patents·877 citations·filing 1990–1998
Top patents by PatentIndex Score
12 records- 0196US5900633ASpectrometric method for analysis of film thickness and composition on a patterned sampleON LINE TECHN INC·Filed 1997·Granted May 4, 1999·257 cites·33 claims
- 0292US5604581AFilm thickness and free carrier concentration analysis method and apparatusON LINE TECHN INC·Filed 1994·Granted Feb 18, 1997·93 cites·29 claims
- 0390US6161054ACell control method and apparatusON LINE TECHN INC·Filed 1998·Granted Dec 12, 2000·155 cites·13 claims
- 0488US5440143AFolded-path optical analysis gas cellON LINE TECHN INC·Filed 1994·Granted Aug 8, 1995·75 cites·11 claims
- 0588US5403433AMethod and apparatus for monitoring layer processingON LINE TECHN INC·Filed 1993·Granted Apr 4, 1995·105 cites·27 claims
- 0674US5486917AFlexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the sameON LINE TECHN INC·Filed 1994·Granted Jan 23, 1996·53 cites·25 claims
- 0771US6192287B1Method and apparatus for fault detection and controlON LINE TECHN INC·Filed 1998·Granted Feb 20, 2001·46 cites·47 claims
- 0867US5239488AApparatus and method for determining high temperature surface emissivity through reflectance and radiance measurementsON LINE TECHN INC·Filed 1990·Granted Aug 24, 1993·39 cites·25 claims
- 0960US5675412ASystem including unified beamsplitter and parallel reflecting element, and retroreflecting componentON LINE TECHN INC·Filed 1995·Granted Oct 7, 1997·27 cites·5 claims
- 1053US5432336ADetector signal correction method and systemON LINE TECHN INC·Filed 1994·Granted Jul 11, 1995·22 cites·20 claims
- 1134US5285167AMethod and apparatus for signal compressionON LINE TECHN INC·Filed 1992·Granted Feb 8, 1994·4 cites·20 claims
- 1228US5473429AMethod and apparatus for controlling the reciprocating translation of an interferometer reflector or other bodyON LINE TECHN INC·Filed 1994·Granted Dec 5, 1995·1 cites·7 claims
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