Assignee
ONO TAKURO
JP·1 granted patent·1 pending application·4 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0178US8743342B2Reflective imaging optical system, exposure apparatus, and method for producing deviceONO TAKURO·Filed 2010·Granted Jun 3, 2014·4 cites·20 claims
- 0242US2009135510A1Reflective projection optical system, exposure apparatus, device manufacturing method, projection method, and exposure methodONO TAKURO·Filed 2008·Application pending·0 cites
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