Assignee
ONWAFER TECHNOLOGIES INC
US·11 granted patents·536 citations·filing 2000–2005
Top patents by PatentIndex Score
11 records- 0196US6691068B1Methods and apparatus for obtaining data for process operation, optimization, monitoring, and controlONWAFER TECHNOLOGIES INC·Filed 2000·Granted Feb 10, 2004·148 cites·41 claims
- 0294US6542835B2Data collection methods and apparatusONWAFER TECHNOLOGIES INC·Filed 2001·Granted Apr 1, 2003·90 cites·27 claims
- 0390US6738722B2Data collection and correction methods and apparatusONWAFER TECHNOLOGIES INC·Filed 2002·Granted May 18, 2004·54 cites·29 claims
- 0489US7299148B2Methods and apparatus for low distortion parameter measurementsONWAFER TECHNOLOGIES INC·Filed 2005·Granted Nov 20, 2007·20 cites·23 claims
- 0587US6671660B2Methods and apparatus for power controlONWAFER TECHNOLOGIES INC·Filed 2002·Granted Dec 30, 2003·51 cites·19 claims
- 0686US7016754B2Methods of and apparatus for controlling process profilesONWAFER TECHNOLOGIES INC·Filed 2003·Granted Mar 21, 2006·44 cites·21 claims
- 0785US6907364B2Methods and apparatus for deriving thermal flux data for processing a workpieceONWAFER TECHNOLOGIES INC·Filed 2003·Granted Jun 14, 2005·41 cites·21 claims
- 0880US6789034B2Data collection methods and apparatus with parasitic correctionONWAFER TECHNOLOGIES INC·Filed 2002·Granted Sep 7, 2004·26 cites·20 claims
- 0980US6741945B2Sensor geometry correction methods and apparatusONWAFER TECHNOLOGIES INC·Filed 2002·Granted May 25, 2004·25 cites·29 claims
- 1072US7282889B2Maintenance unit for a sensor apparatusONWAFER TECHNOLOGIES INC·Filed 2004·Granted Oct 16, 2007·24 cites·37 claims
- 1164US7212950B2Methods and apparatus for equipment matching and characterizationONWAFER TECHNOLOGIES INC·Filed 2003·Granted May 1, 2007·13 cites·20 claims
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