Assignee
OPAL TECHNOLOGIES LTD
IL·4 granted patents·354 citations·filing 1992–1996
Top patents by PatentIndex Score
4 records- 0196US5659172AReliable defect detection using multiple perspective scanning electron microscope imagesOPAL TECHNOLOGIES LTD·Filed 1996·Granted Aug 19, 1997·157 cites·17 claims
- 0292US5644132ASystem for high resolution imaging and measurement of topographic and material features on a specimenOPAL TECHNOLOGIES LTD·Filed 1995·Granted Jul 1, 1997·107 cites·9 claims
- 0386US5466940AElectron detector with high backscattered electron acceptance for particle beam apparatusOPAL TECHNOLOGIES LTD·Filed 1994·Granted Nov 14, 1995·55 cites·29 claims
- 0476US5311288AMethod and apparatus for detecting surface deviations from a reference planeOPAL TECHNOLOGIES LTD·Filed 1992·Granted May 10, 1994·35 cites·20 claims
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