Assignee
ORIOL INC
US·19 granted patents·1 pending application·669 citations·filing 2001–2007
Top patents by PatentIndex Score
20 records- 0197US6841802B2Thin film light emitting diodeORIOL INC·Filed 2002·Granted Jan 11, 2005·89 cites·24 claims
- 0295US6949395B2Method of making diode having reflective layerORIOL INC·Filed 2001·Granted Sep 27, 2005·94 cites·73 claims
- 0394US6744196B1Thin film LEDORIOL INC·Filed 2002·Granted Jun 1, 2004·171 cites·39 claims
- 0492US6822202B2Semiconductor processing temperature controlORIOL INC·Filed 2002·Granted Nov 23, 2004·65 cites·17 claims
- 0590US6818532B2Method of etching substratesORIOL INC·Filed 2002·Granted Nov 16, 2004·50 cites·47 claims
- 0689US7004815B2Apparatus and method for sequentially polishing and loading/unloading semiconductor wafersORIOL INC·Filed 2005·Granted Feb 28, 2006·10 cites·17 claims
- 0788US7104867B2Apparatus and method for sequentially polishing and loading/unloading semiconductor wafersORIOL INC·Filed 2005·Granted Sep 12, 2006·8 cites·15 claims
- 0887US7186165B2Apparatus and method for sequentially polishing and loading/unloading semiconductor wafersORIOL INC·Filed 2006·Granted Mar 6, 2007·8 cites·12 claims
- 0986US6905398B2Chemical mechanical polishing tool, apparatus and methodORIOL INC·Filed 2001·Granted Jun 14, 2005·34 cites·19 claims
- 1083US6835118B2Rigid plate assembly with polishing pad and method of usingORIOL INC·Filed 2001·Granted Dec 28, 2004·24 cites·20 claims
- 1182US6561881B2System and method for chemical mechanical polishing using multiple small polishing padsORIOL INC·Filed 2001·Granted May 13, 2003·23 cites·5 claims
- 1281US6586336B2Chemical-mechanical-polishing stationORIOL INC·Filed 2001·Granted Jul 1, 2003·24 cites·283 claims
- 1373US7069984B2Multi-channel temperature control system for semiconductor processing facilitiesORIOL INC·Filed 2001·Granted Jul 4, 2006·15 cites·20 claims
- 1472US6942545B2Apparatus and method for sequentially polishing and loading/unloading semiconductor wafersORIOL INC·Filed 2001·Granted Sep 13, 2005·9 cites·11 claims
- 1570US6949466B2CMP apparatus and method for polishing multiple semiconductor wafers on a single polishing pad using multiple slurry delivery linesORIOL INC·Filed 2001·Granted Sep 27, 2005·11 cites·25 claims
- 1668US6575818B2Apparatus and method for polishing multiple semiconductor wafers in parallelORIOL INC·Filed 2001·Granted Jun 10, 2003·12 cites·15 claims
- 1767US6949177B2System and method for processing semiconductor wafers using different wafer processesORIOL INC·Filed 2001·Granted Sep 27, 2005·9 cites·30 claims
- 1862US7225864B2Multi-channel temperature control system for semiconductor processing facilitiesORIOL INC·Filed 2001·Granted Jun 5, 2007·8 cites·30 claims
- 1959US7180036B2Semiconductor processing temperature controlORIOL INC·Filed 2004·Granted Feb 20, 2007·5 cites·14 claims
- 2050US2008038992A1Apparatus and method for sequentially polishing and loading/unloading semiconductor wafersORIOL INC·Filed 2007·Application pending·0 cites
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