Assignee
OSADA NAOYUKI
JP·3 granted patents·18 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0188US9378988B2Substrate processing apparatus and substrate processing method using processing solutionOSADA NAOYUKI·Filed 2012·Granted Jun 28, 2016·17 cites·4 claims
- 0258US9027577B2Nozzle and a substrate processing apparatus including the sameOSADA NAOYUKI·Filed 2007·Granted May 12, 2015·1 cites·12 claims
- 0345US9190300B2Method of cleaning substrate processing apparatusOSADA NAOYUKI·Filed 2012·Granted Nov 17, 2015·0 cites·8 claims
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