Assignee
OSSMANN JENS
DE·3 granted patents·9 citations·filing 2008–2012
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0179US8253925B2Catoptric illumination system for microlithography toolOSSMANN JENS·Filed 2009·Granted Aug 28, 2012·5 cites·24 claims
- 0273US8174677B2Illumination optical system for microlithographyOSSMANN JENS·Filed 2008·Granted May 8, 2012·4 cites·20 claims
- 0352US9588434B2Catoptric illumination system for microlithography toolOSSMANN JENS·Filed 2012·Granted Mar 7, 2017·0 cites·25 claims
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