Assignee
OTA YOSUKE
JP·7 granted patents·25 citations·filing 2008–2012
Top patents by PatentIndex Score
7 records- 0188US8575042B2Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatusOTA YOSUKE·Filed 2012·Granted Nov 5, 2013·7 cites·14 claims
- 0283US8202809B2Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatusOTA YOSUKE·Filed 2010·Granted Jun 19, 2012·6 cites·16 claims
- 0381US9123530B2Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatusOTA YOSUKE·Filed 2012·Granted Sep 1, 2015·4 cites·14 claims
- 0476US8901014B2Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer readable recording mediumOTA YOSUKE·Filed 2012·Granted Dec 2, 2014·3 cites·14 claims
- 0569US8410003B2Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatusOTA YOSUKE·Filed 2011·Granted Apr 2, 2013·3 cites·12 claims
- 0660US8174190B2Dispersion liquid for near-infrared-absorbing adhesive-body, near-infrared-absorbing adhesive body, near-infrared-absorbing plasma-display-panel filter, and plasma display panelOTA YOSUKE·Filed 2008·Granted May 8, 2012·2 cites·11 claims
- 0740US9196473B2Method of manufacturing an oxynitride film for a semiconductor deviceOTA YOSUKE·Filed 2011·Granted Nov 24, 2015·0 cites·19 claims
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