Assignee

OTT KEVIN C

US·1 granted patent·61 citations·filing 1991–1991

Technology mixC23C1 H10N1 Y10S1

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1 record

0181US5278138AAerosol chemical vapor deposition of metal oxide filmsOTT KEVIN C·Filed 1991·Granted Jan 11, 1994·61 cites·10 claims

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