Assignee
OZAKI YUKIO
JP·2 granted patents·1 pending application·327 citations·filing 2005–2010
Top patents by PatentIndex Score
3 records- 0195US8443484B2Substrate processing apparatusOZAKI YUKIO·Filed 2008·Granted May 21, 2013·327 cites·9 claims
- 0250US2006113350A1Resonator, ultrasonic head, and ultrasonic bonder using the sameOZAKI YUKIO·Filed 2005·Application pending·0 cites
- 0331US8457774B2Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting methodOZAKI YUKIO·Filed 2010·Granted Jun 4, 2013·0 cites·3 claims
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