Assignee
PADIY ALEXANDER VIKTOROVYCH
NL·4 granted patents·17 citations·filing 2011–2011
Top patents by PatentIndex Score
4 records- 0189US8687167B2Lithographic apparatus and device manufacturing methodPADIY ALEXANDER VIKTOROVYCH·Filed 2011·Granted Apr 1, 2014·7 cites·26 claims
- 0287US8947630B2Lithographic apparatus and device manufacturing methodPADIY ALEXANDER VIKTOROVYCH·Filed 2011·Granted Feb 3, 2015·6 cites·27 claims
- 0379US8947643B2Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substratePADIY ALEXANDER VIKTOROVYCH·Filed 2011·Granted Feb 3, 2015·3 cites·20 claims
- 0465US9134625B2Lithographic apparatus and device manufacturing method for measuring wafer parameters using non-standard alignment settingsPADIY ALEXANDER VIKTOROVYCH·Filed 2011·Granted Sep 15, 2015·1 cites·21 claims
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