Assignee
PARK BEOM SOO
US·3 granted patents·324 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0196US8174400B2Frequency monitoring to detect plasma process abnormalityPARK BEOM SOO·Filed 2011·Granted May 8, 2012·324 cites·15 claims
- 0250US8430961B2Source gas flow path control in PECVD system to control a by-product film deposition on inside chamberPARK BEOM SOO·Filed 2008·Granted Apr 30, 2013·0 cites·20 claims
- 0338US8674844B2Detecting plasma chamber malfunctionPARK BEOM SOO·Filed 2010·Granted Mar 18, 2014·0 cites·15 claims
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